MonitoringCondition Monitoring, Pressure Sensors, Flow Sensors/Flow Meters, Temperature Sensors, I/O Modules
Reliable monitoring of cooling circuits in silicon crystal growing furnaces
IO-Link solution for cooling circuits in crystal growing furnaces, ensuring stable equipment operation and maintaining a consistent internal thermal field for high-quality crystal growth
Benefits
- Stable and interference free acquisition of cooling circuit process data
- Early detection of developing faults through continuous sensor diagnostics
- Reduced maintenance effort via remote parameterization and plug and play replacement
- Increased furnace availability during long, uninterrupted production cycles
- Reliable operation in harsh thermal and chemical environments
Challenge
The temperature and pressure of liquids in cooling circuits in crystal growing furnaces face strong electromagnetic interference from pumps and inverters. Classical 4–20 mA analog signals are prone to noise, signal drift and unreliable data. These conventional sensors provide no insight into device health, preventing early detection of flow or temperature deviations. As furnaces run continuously for days or weeks, failures, combined with difficult on site maintenance in hot, humid environments, can lead to downtime and severe material loss.
Solution
TURCK’s IO Link enabled temperature and flow sensors TS+ and FS+ in combination with IO-Link-Master TBEN-L provide reliable digital communication for cooling circuit monitoring in crystal growing furnaces. By replacing analog signals with interference free IO Link communication, process values and device diagnostics are transmitted reliably to the control system. Integrated sensor diagnostics enable early detection of flow or temperature deviations, while centralized parameterization allows configuration and replacement without on site intervention. Robust sensor housings and highly protected IO Link masters ensure reliable long term operation in corrosive and humid environments.
“TURCK’s IO-Link solution overcomes interference, enables predictive maintenance, and ensures reliable operation in crystal growing furnaces.”
Chien-Hsun (Josh) Chuang | Sales Director Greater China | TURCK GmbH
Learn more about our products
Fieldbus Technology
I/O Modules
Network protocol: EtherNet/IPProduct type: I/O ModuleApprovals: ATEX Zone 2/22Signal type: IO-Link
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